Optical autofocus system

The semi elliptical standard light output from the autofocus sensor is coupled into the objective lens through a beam splitter and converges into a light pattern. By capturing images of the light profile, the defocus distance and defocus direction are calculated, and the industrial computer sends instructions to the motion platform to achieve high-speed movement, keeping it always on the focal plane.

1. High speed real-time focusing
The intelligent focusing system has high-speed defocusing amount sampling, which can quickly detect the defocusing distance and direction of the target surface, adjust the working distance quickly, and ensure that the measured surface can be imaged clearly in real time. In a conventional 10x objective lens, with a defocus of 100um, the refocusing time is less than 100ms.
2. Submicron level tracking accuracy
The focusing accuracy of the intelligent focusing system reaches sub micron level, and the focusing accuracy is better than 1/3 of the objective depth of field
3. Wide focusing range
Under conventional objective magnification, the intelligent focusing system has a sufficiently large focusing range, which can compensate for the height positioning deviation of the target object during loading and adapt to more complex focusing scenes.
4. Good adaptability to the scene
Suitable for multiple materials: able to accommodate more complex target surface textures and meet stringent detection requirements; Adapt to different imaging band requirements.